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1

Wafer-level bonding and direct electrical interconnection of stacked 3D MEMS by a hybrid low temperature process

S. Kühne, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 1.01 MB

english, 2011

2

Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter

Li, Yunjia, Psychogiou, Dimitra, Kuhne, Stephane, Hesselbarth, Jan, Hafner, Christian, Hierold, Christofer

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

3

The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems

Marie K. Tripp, Christoph Stampfer, David C. Miller, Thomas Helbling, Cari F. Herrmann, Christofer Hierold, Ken Gall, Steven M. George, Victor M. Bright

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 475 KB

english, 2006

4

Superparamagnetic Twist-Type Actuators with Shape-Independent Magnetic Properties and Surface Functionalization for Advanced Biomedical Applications

Peters, Christian, Ergeneman, Olgaç, García, Pedro D. Wendel, Müller, Michelle, Pané, Salvador, Nelson, Bradley J., Hierold, Christofer

Journal:

Advanced Functional Materials

Year:

2014

Language:

english

File:

PDF, 4.81 MB

english, 2014

5

Calibration scheme for a new type of 3D Hall sensor

Wouters, C., Vranković, V., Chevtsov, P., Hierold, C.

Journal:

Sensors and Actuators A: Physical

Year:

2017

Language:

english

File:

PDF, 1.34 MB

english, 2017

6

Skin Conformal Polymer Electrodes for Clinical ECG and EEG Recordings

Stauffer, Flurin, Thielen, Moritz, Sauter, Christina, Chardonnens, Séverine, Bachmann, Simon, Tybrandt, Klas, Peters, Christian, Hierold, Christofer, Vörös, Janos

Journal:

Advanced Healthcare Materials

Year:

2018

Language:

english

File:

PDF, 3.28 MB

english, 2018

7

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Experimental fractal-like instability bands in a resonant silicon-silicon contact pull-in vibration detector

Maiwald, Verena, Flader, Ian B., Muller, Michelle, Chen, Yunhan, Pluss, Silvan, Shin, Dongsuk D., Roman, Cosmin, Heinz, David B., Kenny, Thomas W., Hierold, Christofer

Year:

2018

Language:

english

File:

PDF, 577 KB

english, 2018

8

Quantitative analysis of gas mixtures with non-selective gas sensors

Chr. Hierold, R. Müller

Journal:

Sensors and Actuators

Year:

1989

Language:

english

File:

PDF, 327 KB

english, 1989

9

Optimization and fabrication of thick flexible polymer based micro thermoelectric generator

Wulf Glatz, Simon Muntwyler, Christofer Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 1.53 MB

english, 2006

10

Novel ultrasound read-out for a wireless implantable passive strain sensor (WIPSS)

F. Gattiker, F. Umbrecht, J. Neuenschwander, U. Sennhauser, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 726 KB

english, 2008

11

SWNT growth by CVD on Ferritin-based iron catalyst nanoparticles towards CNT sensors

L. Durrer, T. Helbling, C. Zenger, A. Jungen, C. Stampfer, C. Hierold

Journal:

Sensors and Actuators B: Chemical

Year:

2008

Language:

english

File:

PDF, 1014 KB

english, 2008

12

Full integration of a pressure-sensor system into a standard BiCMOS process

T. Scheiter, H. Kapels, K.-G. Oppermann, M. Steger, C. Hierold, W.M. Werner, H.-J. Timme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 452 KB

english, 1998

13

-Based Flexible Micro Thermoelectric Generator With Optimized Design

Glatz, W., Schwyter, E., Durrer, L., Hierold, C.

Journal:

Journal of Microelectromechanical Systems

Year:

2009

Language:

english

File:

PDF, 2.54 MB

english, 2009

14

A catena in northeast Brandenburg (Bolkendorf): Soil biota, root growth and soil structure

Joschko, Monika, Rogasik, Helmut, Dannowski, Margitta, Hierold, Wilfried, Heisler, Claus

Journal:

Archives of Agronomy and Soil Science

Year:

1998

Language:

english

File:

PDF, 557 KB

english, 1998

15

[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - A pure CMOS surface micromachined integrated accelerometer

Hierold, C., Hildebrandt, A., Naher, U., Scheiter, T., Mensching, B., Steger, M., Tielert, R.

Year:

1996

Language:

english

File:

PDF, 673 KB

english, 1996

16

Visible Light Curing of Epon SU-8 Based Superparamagnetic Polymer Composites with Random and Ordered Particle Configurations

Peters, Christian, Ergeneman, Olgaç, Sotiriou, Georgios A., Choi, Hongsoo, Nelson, Bradley J., Hierold, Christofer

Journal:

ACS Applied Materials & Interfaces

Year:

2015

Language:

english

File:

PDF, 3.23 MB

english, 2015

17

SU-8 as a Torsional Spring: Viscoelastic Creeping and Closed Loop Control

Li, Yunjia, Hierold, Christofer

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 2.08 MB

english, 2015

18

From radio telemetry to ultra-low-power sensor networks: tracking bats in the wild

Dressler, Falko, Ripperger, Simon, Hierold, Martin, Nowak, Thorsten, Eibel, Christopher, Cassens, Bjorn, Mayer, Frieder, Meyer-Wegener, Klaus, Kolpin, Alexander

Journal:

IEEE Communications Magazine

Year:

2016

Language:

english

File:

PDF, 2.13 MB

english, 2016

19

Micromechanics compatible with an 0.8 μm CMOS process

M. Biebl, T. Scheiter, C. Hierold, H.v. Philipsborn, H. Klose

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 555 KB

1995

20

Gas analysis by partial model building

G. Horner, Chr. Hierold

Journal:

Sensors and Actuators B: Chemical

Year:

1990

Language:

english

File:

PDF, 1.10 MB

english, 1990

21

Process integration of carbon nanotubes into microelectromechanical systems

Alain Jungen, Christoph Stampfer, Jochen Hoetzel, Victor M. Bright, Christofer Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 654 KB

english, 2006

22

Fabrication and characterization of folded SU-8 suspensions for MEMS applications

Daniel Bachmann, Bernd Schöberle, Stéphane Kühne, Yves Leiner, Christofer Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 523 KB

english, 2006

23

Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function

Daniel Bachmann, Stéphane Kühne, Christofer Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 723 KB

english, 2006

24

Long-term creep behavior of SU-8 membranes: Application of the time–stress superposition principle to determine the master creep compliance curve

B. Schoeberle, M. Wendlandt, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 377 KB

english, 2008

25

Erratum to “Long-term creep behavior of SU-8 membranes: Application of the timestress superposition principle to determine the master creep compliance curve” [Sens. Actuator A 142 (2008) 242–249]

B. Schoeberle, M. Wendlandt, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 131 KB

english, 2008

26

Solvent assisted bonding of polymethylmethacrylate: Characterization using the response surface methodology

F. Umbrecht, D. Müller, F. Gattiker, C.M. Boutry, J. Neuenschwander, U. Sennhauser, Ch. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.07 MB

english, 2009

27

A novel method to avoid sticking of surface-micromachined structures

F Kozlowski, N Lindmair, Th Scheiter, C Hierold, W Lang

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 302 KB

english, 1996

28

A pure CMOS surface-micromachined integrated accelerometer

Christofer Hierold, Andreas Hildebrandt, Ulrich Na¨her, Thomas Scheiter, Bernd Mensching, Max Steger, Reinhard Tielert

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 428 KB

english, 1996

29

Low power integrated pressure sensor system for medical applications

C Hierold, B Clasbrummel, D Behrend, T Scheiter, M Steger, K Oppermann, H Kapels, E Landgraf, D Wenzel, D Etzrodt

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 6.70 MB

english, 1999

30

Nano electromechanical sensors based on carbon nanotubes

Christofer Hierold, Alain Jungen, Christoph Stampfer, Thomas Helbling

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.60 MB

english, 2007

31

Electrostatically actuated nonconductive polymer microresonators in gaseous and aqueous environment

S. Schmid, P. Senn, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 635 KB

english, 2008

32

Spatially Resolved Raman Spectroscopy of Single- and Few-Layer Graphene

Graf, D., Molitor, F., Ensslin, K., Stampfer, C., Jungen, A., Hierold, C., Wirtz, L.

Journal:

Year:

2007

Language:

english

File:

PDF, 292 KB

english, 2007

33

Power enhancement of micro thermoelectric generators by microfluidic heat transfer packaging

N. Wojtas, E. Schwyter, W. Glatz, S. Kühne, W. Escher, C. Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.06 MB

english, 2012

34

An in-plane cobalt–nickel microresonator sensor with magnetic actuation and readout

O. Ergeneman, P. Eberle, M. Suter, G. Chatzipirpiridis, K.M. Sivaraman, S. Pané, C. Hierold, B.J. Nelson

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 838 KB

english, 2012

35

Characterization of miniaturized RLC resonators made of biodegradable materials for wireless implant applications

Clémentine M. Boutry, Hengky Chandrahalim, Patrick Streit, Michael Schinhammer, Anja C. Hänzi, Christofer Hierold

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 2.67 MB

english, 2013

36

Millimeter-wave phase shifter based on waveguide-mounted RF-MEMS

Psychogiou, Dimitra, Li, Yunjia, Hesselbarth, Jan, Kühne, Stephane, Peroulis, Dimitrios, Hierold, Christofer, Hafner, Christian

Journal:

Microwave and Optical Technology Letters

Year:

2013

Language:

english

File:

PDF, 551 KB

english, 2013

37

From micro- to nanosystems: mechanical sensors go nano

Hierold, Christofer

Journal:

Journal of Micromechanics and Microengineering

Year:

2004

Language:

english

File:

PDF, 440 KB

english, 2004

38

Superparamagnetic microrobots: fabrication by two-photon polymerization and biocompatibility

Marcel Suter, Li Zhang, Erdem C. Siringil, Christian Peters, Tessa Luehmann, Olgac Ergeneman, Kathrin E. Peyer, Bradley J. Nelson, Christofer Hierold

Journal:

Biomedical Microdevices

Year:

2013

Language:

english

File:

PDF, 483 KB

english, 2013

39

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Process control monitors for single-walled carbon nanotube based sensor fabrication processes

Chikkadi, K., Roman, C., Hierold, C.

Year:

2013

Language:

english

File:

PDF, 599 KB

english, 2013

40

Optimized thermal coupling of micro thermoelectric generators for improved output performance

Wojtas, N., Rüthemann, L., Glatz, W., Hierold, C.

Journal:

Renewable Energy

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

41

Improving non-suspended carbon nanotube FET performance by using an alumina protective layer

Liu, Wei, Chikkadi, Kiran, Lee, Shih-Wei, Hierold, Christofer, Haluska, Miroslav

Journal:

Sensors and Actuators B: Chemical

Year:

2014

Language:

english

File:

PDF, 1.59 MB

english, 2014

42

[IEEE 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies (IMWS 2011) - Sitges, Spain (2011.09.15-2011.09.16)] 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies - W-band tunable reflective type phase shifter based on waveguide-mounted RF MEMS

Psychogiou, D., Hesselbarth, J., Li, Y., Kuehne, S., Hierold, C.

Year:

2011

Language:

english

File:

PDF, 1.01 MB

english, 2011

43

Determination of the Pull-Off Forces and Pull-Off Dynamics of an Electrostatically Actuated Silicon Disk

D. Bachmann, C. Hierold

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 987 KB

english, 2008

44

Fabrication of discrete nanoscaled force sensors based on single-walled carbon nanotubes

Stampfer, C., Jungen, A., Hierold, C.

Journal:

IEEE Sensors Journal

Year:

2006

Language:

english

File:

PDF, 1.57 MB

english, 2006

45

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Ultra Small Single Walled Carbon Nanotube Pressure Sensors

Helbling, T., Drittenbass, S., Durrer, L., Roman, C., Hierold, C.

Year:

2009

Language:

english

File:

PDF, 10.72 MB

english, 2009

46

Carbon Nanotubes over Metallic Wires and its Possible Applications

Sarangi, D., Hierold, C., Karimi, A.

Journal:

Fullerenes Nanotubes and Carbon Nanostructures

Year:

2005

Language:

english

File:

PDF, 380 KB

english, 2005

47

Continuously variable W-band phase shifters based on MEMS-actuated conductive fingers

Psychogiou, Dimitra, Li, Yunjia, Hesselbarth, Jan, Peroulis, Dimitrios, Hierold, Christofer, Hafner, Christian

Journal:

International Journal of Microwave and Wireless Technologies

Year:

2013

Language:

english

File:

PDF, 1.03 MB

english, 2013

48

Wafer-level packaging and direct interconnection technology based on hybrid bonding and through silicon vias

Kühne, Stéphane, Hierold, Christofer

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 39 KB

english, 2011

49

Design and fabrication of an innovative three-axis Hall sensor

Wouters, C., Vranković, V., Rössler, C., Sidorov, S., Ensslin, K., Wegscheider, W., Hierold, C.

Journal:

Sensors and Actuators A: Physical

Year:

2016

Language:

english

File:

PDF, 2.02 MB

english, 2016

50

NANO ELECTRO MECHANICAL SYSTEMS WITH SINGLE WALLED CARBON NANOTUBES AS FUNCTIONAL ELEMENTS

Hierold, C., Stampfer, C., Helbling, T., Jungen, A., Sarangi, D.

Journal:

IFAC Proceedings Volumes

Year:

2006

Language:

english

File:

PDF, 2.31 MB

english, 2006

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